MDS Stainless Steel Vortex Magnetic Drive Pump
Product Overview
MDS Magnetic Drive High-Low Temperature Vortex Pump features stainless steel wetted parts. Adopting a shaft seal-free, magnetic drive design, it converts dynamic seals into static seals, ensuring the pump’s safety and stability under cryogenic and high-temperature operating conditions. Engineered as a semiconductor-dedicated pump, the MDS serves precision temperature control points across the wafer process chain, including polishing and cleaning lines, CMP conditioning, thin-film deposition (CVD/PVD), etching system cooling, and packaging and test equipment. Helium leak-tested sealing keeps high-purity process media contained and the fab environment protected. The same compact, leak-free design supports AI and advanced computing applications: microchannel cooling circuits, liquid cooling loops for chip and server thermal validation, and optical lens temperature control. Rated for −196°C to +400°C media, the MDS handles water-glycol mixtures and other coolants in space-constrained OEM equipment.
Product Features
- The pump body is treated with a highly wear-resistant D-type processing technology
- Precision casting with medium-temperature wax and multi-step surface treatment technology
- High-pressure sealing technology tested by helium leak detection
- Contamination-free stainless steel fluid path with static sealing for high-purity semiconductor process media
- Compact vortex hydraulics delivering 20–100 m heads at 0.5–8 m³/h for precision temperature control loops
- Rated for water-glycol mixtures used in AI chip and microchannel cooling systems
- Integration-ready compact design for OEM temperature control and test equipment
Technical Specifications
| Model | Diameter | Motor | Performance Parameter | Pump Weight (kg) | ||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Inlet | Outlet | Power (kW) | (Hp) | Voltage (V) | Frequency (Hz) | Speed (r/min) | Max Head (m) | Max Capacity (L/min) | ||
| MDS-15 | G1/2" | G1/2" | 1.1 | 1.5 | 3Φ-380 | 50 | 2760 | 55 | 35 | 13.5 |
| MDS-20 | G3/4" | G3/4" | 1.5 | 2 | 3Φ-380 | 50 | 2760 | 70 | 60 | 22 |
| MDS-30 | G3/4" | G3/4" | 2.2 | 3 | 3Φ-380 | 50 | 2760 | 90 | 60 | 26 |
*The above characteristic testing is based on water transfer at normal speed under 20°C. The performance parameter error is approximately ±10%. Pump performance varies depending on the proportion and density of the liquid medium.
Pump Structure
The MDS Pump production structure consists of the Pump Cover, Spindle, Impeller, Pump Body, Axle Sleeve, Packing Ring, Inside Magnet, Isolation Cover, Outside Magnet, and Motor, forming a wear-resistant leak-proof cryogenic and high-temperature fluid transfer assembly.
Performance Curve
The MDS Pump production structure consists of the Pump Cover, Spindle, Impeller, Pump Body, Axle Sleeve, Packing Ring, Inside Magnet, Isolation Cover, Outside Magnet, and Motor, forming a wear-resistant leak-proof cryogenic and high-temperature fluid transfer assembly.
Working Condition
| Medium Temperature | Medium Density | Ambient Temperature | Maximum Elevation | Max Withstand Pressure |
|---|---|---|---|---|
| -196°C ~ +400°C | 0.6 ~ 2.0 | -50°C ~ +70°C | 5000m | 70bar |
Application Area
The MDS is specified across four application groups where compact size, zero leakage, and precision temperature control intersect.
Semiconductor Manufacturing
Precision temperature control and media circulation for wafer polishing and cleaning lines, CMP (chemical mechanical planarization) temperature conditioning, thin-film deposition equipment (CVD/PVD), etching system cooling, and packaging and test handlers. The helium leak-tested static containment and stainless steel wetted path protect high-purity process media from contamination and the fab environment from leakage.
AI and Advanced Computing Cooling
Microchannel cooling circuits, liquid cooling loops for AI chip and server thermal validation, and coolant circulation in compact test benches for high-density computing hardware. The pump handles water-glycol mixtures at stable low-flow pressure and fits space-constrained OEM cooling modules.
Optics and Precision Instruments
Optical lens precision temperature control, high-low temperature test chambers and instruments, and laboratory-grade thermal conditioning systems requiring stable, pulsation-free circulation in a compact footprint.
Process and Cleaning Equipment
Microchannel reactors, ultrasonic cleaning equipment, and other compact circulation duties in chemical and process applications requiring corrosion-resistant, leak-free fluid transfer.
Product Certification
